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On the Development and Characterization of PMA-based SAW Sensing Devices

✍ Scribed by Donato, N.; Aloisio, D.; Patti, E.; Latino, M.; Leonardi, S.G.; Spadaro, D.

Book ID: 123408926
Publisher: Elsevier
Year: 2012
Tongue: English
Weight: 311 KB
Volume: 47
Category: Article
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2012.09.385

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## Abstract We designed a SAW filter in this work by combining the piezoelectric ZnO film with a freestanding double layer diamond film deposited using CH~4~–H~2~ pulsed MPACVD process through two growth stages. The AFM measurements on the nucleation side of the diamond film has shown that this sid