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On the Chemical Mechanism of the Zinc Diffusion into GaAs from SiO2 Spin-on Films

✍ Scribed by Dr. E. Nowak; Prof. Dr. G. Kühn; Dr. B. Schumann; Dipl. -Phys. R. Hesse; Dr. H. Sobotta

Publisher: John Wiley and Sons
Year: 1992
Tongue: English
Weight: 300 KB
Volume: 27
Category: Article
ISSN: 0232-1300
DOI: 10.1002/crat.2170270415

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