✦ LIBER ✦
On material selection for ultra-high accuracy and high-speed machine table for applications such as E-beam lithography
✍ Scribed by Shane Y. Hong
- Book ID
- 103532076
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 399 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0141-6359
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