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On light-induced effect in amorphous hydrogenated silicon

โœ Scribed by Guha, S.

Book ID
121805658
Publisher
American Institute of Physics
Year
1981
Tongue
English
Weight
377 KB
Volume
52
Category
Article
ISSN
0021-8979

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Hydrogenated amorphous silicon films (a-Si:H) have been deposited by r.f. glow discharge of silane (Sill 4) and hydrogen (H 2) gas mixture. The hydrogen concentration in the gas mixture and the applied r.f. power density have been varied. The initial photoconductivity (crp), photosensitivity (%/~d),