✦ LIBER ✦
On epitaxial Si1−xGex thin film growth by chemical vapour deposition from a silane, germane, hydrogen chloride and hydrogen gas mixture
✍ Scribed by H. Kühne; Th. Morgenstern; P. Zaumseil; D. Krüger; G. Ritter; H. Richter
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 540 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0921-5107
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