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On copper diffusion in silicon measured by glow discharge mass spectrometry

✍ Scribed by Modanese, Chiara; Gaspar, Guilherme; Arnberg, Lars; Di Sabatino, Marisa

Book ID: 127253546
Publisher: Springer
Year: 2014
Tongue: English
Weight: 807 KB
Volume: 406
Category: Article
ISSN: 1618-2650
DOI: 10.1007/s00216-014-8105-0

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