✦ LIBER ✦
On contact lithography of high-aspect-ratio features with incoherent broadband ultraviolet illumination
✍ Scribed by Fei Wang; Katherine E. Weaver; Akhlesh Lakhtakia; Mark W. Horn
- Book ID
- 104050241
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 322 KB
- Volume
- 77
- Category
- Article
- ISSN
- 0167-9317
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