✦ LIBER ✦

On certain effects of the electron lithographic microprocessing of thin films

✍ Scribed by G. Mladenov; R. Dimitrova

Book ID: 107862179
Publisher: Elsevier Science
Year: 1976
Tongue: English
Weight: 61 KB
Volume: 36
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(76)90049-3

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