✦ LIBER ✦
On adsorption of aluminium and methyl groups on silica for TMA/H2O process in atomic layer deposition of aluminium oxide nano layers
✍ Scribed by Anu Philip; K. Rajeev Kumar
- Book ID
- 107582304
- Publisher
- Springer-Verlag
- Year
- 2010
- Tongue
- English
- Weight
- 196 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0250-4707
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