Off-axis alignment of an LDA-probe and the effect of astigmatism on measurements
โ Scribed by Z. Zhang; K. Eisele
- Publisher
- Springer
- Year
- 1995
- Tongue
- English
- Weight
- 569 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0723-4864
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๐ SIMILAR VOLUMES
The accuracy of LDA measurements depends on the optical alignment of the laser beams. Improperly designed optical systems lead to fringe distortion in the measurement volume and in earlier investigations this effect has always been taken as the main cause of optical inaccuracy in LDA measurements. I
The friction and pull-off forces were measured between atomic force microscope AFM probe and submicron-size asperity arrays on ลฝ . a silicon wafer in various relative humidities. First, a focused ion beam FIB was used to produce two-dimensional arrays in which asperities were arranged at uniform int