Observations on the formation and ashing of giant folds in high dose ion-implanted resists

✍ Scribed by G. K. Vinogradov; V. M. Menagarishvili

• Book ID: 121799642
• Publisher: AVS (American Vacuum Society)
• Year: 1999
• Tongue: English
• Weight: 780 KB
• Volume: 17
• Category: Article
• ISSN: 0734-211X
• DOI: 10.1116/1.590521