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Observations of Al2O3 and free silicon at the interface between aluminum films and SiO2

✍ Scribed by Y.E. Strausser; E.J. Scheibner; J.S. Johannessen


Publisher
Elsevier Science
Year
1978
Tongue
English
Weight
574 KB
Volume
52
Category
Article
ISSN
0040-6090

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