✦ LIBER ✦
Observation of voids induced by mechanical stress and electromigration in passivated Al lines deposited at different purity levels
✍ Scribed by Marieb, T.; Bravman, J. C.; Flinn, P.; Gardner, D. S.; Madden, M.
- Book ID
- 121234759
- Publisher
- American Institute of Physics
- Year
- 1994
- Tongue
- English
- Weight
- 703 KB
- Volume
- 64
- Category
- Article
- ISSN
- 0003-6951
- DOI
- 10.1063/1.111588
No coin nor oath required. For personal study only.