✦ LIBER ✦
Observation of short-range oxygen migration and oxygen exchange during low temperature plasma anodization of silicon through thin ZrO2 films
✍ Scribed by J. Perriere; J. Siejka; R.P.H. Chang
- Publisher
- Elsevier Science
- Year
- 1982
- Tongue
- English
- Weight
- 349 KB
- Volume
- 95
- Category
- Article
- ISSN
- 0040-6090
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