✦ LIBER ✦
Observation of local crystal orientation variation of Al line due to LSI processing by using two-million-volts electron microscope
✍ Scribed by K. Ura; A. Takaoka; K. Yoshida; J. Wada
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 393 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0167-9317
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