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Observation of intermittent behavior in a radio-frequency discharge

✍ Scribed by C. Wunderlich; L. Moorman; P.M. Koch

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 890 KB
Volume: 176
Category: Article
ISSN: 0375-9601
DOI: 10.1016/0375-9601(93)90926-q

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