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Numerical study of AlGaN growth by MOVPE in an AIX200 RF horizontal reactor

✍ Scribed by E. Mešić; M. Mukinović; G. Brenner


Book ID
116374137
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
513 KB
Volume
31
Category
Article
ISSN
0927-0256

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