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Numerical simulation of turbomolecular pump over a wide range of gas rarefaction

✍ Scribed by F. Sharipov

Book ID: 125940959
Publisher: AVS (American Vacuum Society)
Year: 2010
Tongue: English
Weight: 343 KB
Volume: 28
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.3484139

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