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Numerical Simulation of the Flow, Temperature, and Concentration Fields in a Radio Frequency Plasma CVD Reactor

✍ Scribed by Guo-Ying, Zhao; Ching-Wen, Zhu


Book ID
117932668
Publisher
IEEE
Year
1986
Tongue
English
Weight
953 KB
Volume
14
Category
Article
ISSN
0093-3813

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