𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Numerical simulation of silane decomposition in an RF plasma

✍ Scribed by V. I. Strunin; A. A. Lyakhov; G. Zh. Khudaibergenov; V. V. Shkurkin

Book ID
110131557
Publisher
Springer
Year
2002
Tongue
English
Weight
86 KB
Volume
47
Category
Article
ISSN
1063-7842

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Decomposition of 1,2-dichloroethane in a
Decomposition of 1,2-dichloroethane in an RF plasma environment
✍ Chun-Teh Li; Renbo Yang; Minliang Shih; Chuh-Yung Chen; Lien-Te Hsieh πŸ“‚ Article πŸ“… 2003 πŸ› Wiley (John Wiley & Sons) 🌐 English βš– 146 KB

## Abstract A radio frequency (RF) plasma system has been used to decompose 1,2‐dichloroethane (DCE). Final products were identified by a Fourier transform infrared (FTIR) spectrometer. The main products of DCE decomposition in O~2~/Ar plasma were CO~2~, CO, and HCl. Other minor chlorinated product