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Numerical simulation of oxygen transport during the CZ silicon crystal growth process

โœ Scribed by Jyh-Chen Chen; Ying-Yang Teng; Wan-Ting Wun; Chung-Wei Lu; Hsueh-I Chen; Chi-Yung Chen; Wen-Chieh Lan

Book ID
108166277
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
907 KB
Volume
318
Category
Article
ISSN
0022-0248

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Numerical simulation of thermal and mass transport during Czochralski crystal growth of sapphire
โœ Chung-Wei Lu; Jyh-Chen Chen ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 609 KB

## Abstract The thermal and flow transport in an inductively heated Czochralski crystal growth furnace during a crystal growth process is investigated numerically. The temperature and flow fields inside the furnace, coupled with the heat generation in the iridium crucible induced by the electromagn