Numerical simulation of oscillatory flow in melt during InSb single crystal growth by RF heating Czochralski method
✍ Scribed by Yasunori Okano; Nicholas Audet; Sadik Dost; Yasuhiro Hayakawa; Masashi Kumagawa
- Publisher
- John Wiley and Sons
- Year
- 1998
- Tongue
- English
- Weight
- 162 KB
- Volume
- 11
- Category
- Article
- ISSN
- 0894-3370
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✦ Synopsis
Oscillatory flow present in the melt during InSb single crystal growth using an RF-heating Czochralski method has been numerically investigated by means of the finite difference method using the HSMAC algorithm. The thermal boundary conditions required for the numerical simulation model were obtained experimentally by measuring the temperature profile along the crucible of a Czochralski system by means of thermocouples mounted in the crucible. Results of numerical simulations showed that the use of a third-order upwind discretization scheme was necessary to catch the oscillatory behaviour of the fluid flow in the melt. It was shown that this oscillatory behaviour strongly depends on the crystal rotation rate. Indeed, the oscillation period increases when the crystal rotation rate is above a critical rotation rate. In order to avoid such oscillations, crystal rotation rates lower than this critical value of crystal rotation rate must be selected for the growth of high quality crystals free of striations.