Numerical Simulation of a DC-Glow-Discharge in an Electronegative Gas

✍ Scribed by W. Schmitt; H. Ruder; W. E. Köhler

• Publisher: John Wiley and Sons
• Year: 1993
• Tongue: English
• Weight: 585 KB
• Volume: 33
• Category: Article
• ISSN: 0005-8025
• DOI: 10.1002/ctpp.2150330204

✦ Synopsis

Abstract

A one‐dimensional continuum model is presented for a dc‐glow‐discharge in an electronegative gas between parallel plates. It is based on the local balance equations for particle densities and fluxes of electrons, positive and negative ions, the local electron energy balance and the Poisson equation for the self‐consistent electric field. These equations are supplemented by suitably chosen boundary conditions and are solved by the finite difference procedure HEMODES (HEnyey Method Ordinary Differential Equation Solver) which, in particular, can successfully handle the singular point occuring if the inertia term in the ion momentum balance equation is taken into account. Since not all data needed within this treatment for the simulation of realistic electronegative gases were available, a fictitious argon‐like gas has been considered which nevertheless can demonstrate the characteristic features of such a discharge. In particular, the influence of variations of the attachment and the ion‐ion recombination coefficients on the physical variables has been studied.