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Numerical simulation and analysis of electrically actuated microbeam-based MEMS capacitive switch

✍ Scribed by Xun-jun He; Qun Wu; Yue Wang; Ming-xin Song; Jing-hua Yin

Book ID: 106185588
Publisher: Springer-Verlag
Year: 2008
Tongue: English
Weight: 290 KB
Volume: 15
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-008-0702-4

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