✦ LIBER ✦
Numerical Modeling of an Ar–H2Radio-Frequency Plasma Reactor under Thermal and Chemical Nonequilibrium Conditions
✍ Scribed by Rubin Ye; Anthony B. Murphy; Takamasa Ishigaki
- Book ID
- 106490897
- Publisher
- Springer
- Year
- 2007
- Tongue
- English
- Weight
- 576 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0272-4324
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