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Numerical modeling of 3‐D comb drive electrostatic accelerometers structure (method of levitation force reduction)

✍ Scribed by Demenko, Andrezej; Wiak, Sławomir; Smółka, Krzysztof


Book ID
120174680
Publisher
Emerald Group Publishing Limited
Year
2009
Tongue
English
Weight
371 KB
Volume
28
Category
Article
ISSN
0332-1649

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