Numerical modeling of 3‐D comb drive electrostatic accelerometers structure (method of levitation force reduction)

✍ Scribed by Demenko, Andrezej; Wiak, Sławomir; Smółka, Krzysztof

• Book ID: 120174680
• Publisher: Emerald Group Publishing Limited
• Year: 2009
• Tongue: English
• Weight: 371 KB
• Volume: 28
• Category: Article
• ISSN: 0332-1649
• DOI: 10.1108/03321640910940864