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Numerical approximation of the physical laws governing scattering in electron beam lithography

✍ Scribed by G. Messina; A. Paoletti; S. Santangelo; A. Tucciarone

Publisher: Italian Physical Society
Year: 1998
Tongue: English
Weight: 466 KB
Volume: 20
Category: Article
ISSN: 0392-6737
DOI: 10.1007/bf03185531

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