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Numerical analysis of the process-induced stresses in silicon microstructures: application to micromachined cantilever

✍ Scribed by Senez, Vincent; Hoffmann, Thomas; Armigliato, Aldo; Wolf, Ingrid De

Book ID: 121405367
Publisher: Institute of Physics
Year: 2005
Tongue: English
Weight: 465 KB
Volume: 15
Category: Article
ISSN: 0964-1726
DOI: 10.1088/0964-1726/15/1/009

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