Nucleation of diamond in the channels of
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Ibn-Charaa, M.; Jaouen, M.; Delafond, J.; Pranevicius, L.
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Article
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1996
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Elsevier Science
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English
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Experimental studies were performed on the nucleation of diamond crystals on the surface of dielectric SIC layers enriched by carbon during simultaneous carbon deposition and 20 keV H+ irradiation at 800 "C. The stochiometric SIC layer with thickness 10 nm was formed employing processes of dynamic a