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Nucleation of diamond in the channels of electrical breakdown in SiC films

โœ Scribed by Ibn-Charaa, M.; Jaouen, M.; Delafond, J.; Pranevicius, L.


Book ID
122056172
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
586 KB
Volume
5
Category
Article
ISSN
0925-9635

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Nucleation of diamond in the channels of
โœ Ibn-Charaa, M.; Jaouen, M.; Delafond, J.; Pranevicius, L. ๐Ÿ“‚ Article ๐Ÿ“… 1996 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 586 KB

Experimental studies were performed on the nucleation of diamond crystals on the surface of dielectric SIC layers enriched by carbon during simultaneous carbon deposition and 20 keV H+ irradiation at 800 "C. The stochiometric SIC layer with thickness 10 nm was formed employing processes of dynamic a