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Nucleation of c-BN from PECVD and TACVD growth species: a theoretical study

✍ Scribed by Mårlid, B; Larsson, K; Carlsson, J.-O


Book ID
123553541
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
107 KB
Volume
10
Category
Article
ISSN
0925-9635

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