Nuclear reaction analysis of hydrogen migration in silicon dioxide films on silicon under 15N ion irradiation

✍ Scribed by K.H. Ecker; J. Krauser; A. Weidinger; H.P. Weise; K. Maser

• Book ID: 114171858
• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 110 KB
• Volume: 161-163
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(99)00830-7