Nuclear nanoprobe development for visualization of three-dimensional nanostructures

✍ Scribed by M. Takai; S. Abo; F. Wakaya; T. Kikuchi; H. Sawaragi

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 206 KB
• Volume: 261
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2007.04.249

✦ Synopsis

A nanoprobe system, having a liquid metal ion source with a compact electrostatic accelerating column with a maximum accelerating voltage of 200 kV and an ultra high vacuum chamber, giving rise to the enhanced sensitivity because of the large scattering cross-section, has been designed for analysis of nanostructures. The focusing performance of the probes down to 10 nm was measured and compared with the simulation. Time-of-flight (TOF) RBS using a micro channel plate (MCP) further increases the sensitivity because of the increase in acceptance angle, which realizes the visualization of nanostructures with a beam spot diameter less than 10 nm with less probe damage.