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[Novosibirsk State Tech. Univ 2001 Siberian Russian Student Workshop on Electron Devices and Materials. Proceedings 2nd Annual - Erlagol, Altai, Russia (3-7 July 2001)] 2001 Siberian Russian Student Workshop on Electron Devices and Materials. Proceedings 2nd Annual (IEEE Cat. No.01EX469) - Metastable argon conditions and balance composition of argon-silane rf plasma

✍ Scribed by Hudaybergenov, G.J.; Strunin, V.I.; Lyahov, A.A.; Shkourkin, V.V.

Book ID: 118142625
Publisher: Novosibirsk State Tech. Univ
Year: 2001
Weight: 258 KB
Volume: 0
Category: Article
ISBN-13: 9785778203471
DOI: 10.1109/sredm.2001.939160

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