✦ LIBER ✦
Novel x-ray mask distortion measurement technique employing holographic gratings and phase-shifting interferometry: Hansen, M. E.; Chen, H. T. H.; Engelstad, R. L.; Cerrina, F. Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena - Symposium on electron, ion and photon beams. 1992 Nov; 10(6)
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 269 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0141-6359
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