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Novel volatile barium .beta.-diketone chelates for chemical vapor deposition of barium fluoride thin films

✍ Scribed by Sato, H.; Sugawara, S.

Book ID: 125424313
Publisher: American Chemical Society
Year: 1993
Tongue: English
Weight: 812 KB
Volume: 32
Category: Article
ISSN: 0020-1669
DOI: 10.1021/ic00062a011

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