✦ LIBER ✦
Novel type humidity sensor based on the porous Si3N4/Si composite fabricated by using N+-implantation and anodization
✍ Scribed by Tu, C. Z. ;Jia, Z. H. ;Rakhman, A.
- Publisher
- John Wiley and Sons
- Year
- 2004
- Tongue
- English
- Weight
- 100 KB
- Volume
- 201
- Category
- Article
- ISSN
- 0031-8965
No coin nor oath required. For personal study only.