Novel submicrometer MOS devices by self-aligned nitridation of silicide

✍ Scribed by Kaneko, H.; Koyanagi, M.; Shimizu, S.; Kubota, Y.; Kishino, S.

• Book ID: 114595724
• Publisher: IEEE
• Year: 1986
• Tongue: English
• Weight: 1016 KB
• Volume: 33
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/t-ed.1986.22731