Novel SThM nanoprobe for thermal properties investigation of micro- and nanoelectronic devices

✍ Scribed by P. Janus; D. Szmigiel; M. Weisheit; G. Wielgoszewski; Y. Ritz; P. Grabiec; M. Hecker; T. Gotszalk; P. Sulecki; E. Zschech

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 516 KB
• Volume: 87
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2009.11.178

✦ Synopsis

In this paper, we present a novel micromachined Atomic Force Microscopy (AFM) micro-cantilever equipped with a sharp, conductive platinum tip. The processing sequence proposed in this article integrates a high reproducibility and precise post-processing applying Focused Ion Beam tip modification. The cantilever is designed for Scanning Thermal Microscopy (SThM) applications in a standard setup with the optical AFM detection system.