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Novel registration technique to register neutral zone

✍ Scribed by Agrawal, Kaushal Kishor; Singh, Saumyendra Vikram; Vero, Nugotsov; Alvi, Habib Ahmed; Chand, Pooran; Singh, Kamleshwar; Goel, Prachi


Book ID
119304972
Publisher
Elsevier
Year
2012
Tongue
English
Weight
564 KB
Volume
2
Category
Article
ISSN
2212-4268

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Novel charge neutralization techniques a
✍ Hirotaka Komoda; Masaaki Yoshida; Yoh Yamamoto; Kouji Iwasaki; Ikuko Nakatani; H πŸ“‚ Article πŸ“… 2006 πŸ› Elsevier Science 🌐 English βš– 513 KB

FIB-induced charging is one of the most critical issues for achieving successful circuit modifications of LSI. We have developed novel charge neutralization techniques applicable to a wide current range (from pico to nanoampere-order) of FIB processing in a FIB-SEM combined system. The method utiliz