✦ LIBER ✦
Novel piezoelectric-driven XYθ wafer table for an electron beam image projector
✍ Scribed by K. Sugihara; I. Mori; T. Tojo; C. Ito; M. Goto; M. Tabata; T. Shinozaki
- Book ID
- 103528813
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 129 KB
- Volume
- 7
- Category
- Article
- ISSN
- 0141-6359
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