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Novel near-field probe for on-wafer integrated circuit measurements

✍ Scribed by G.E. Bridges; T.S. Forzley; D.J. Thomson


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
422 KB
Volume
23
Category
Article
ISSN
0026-2692

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## Abstract The use of an integrated probe performing phaseless near‐field measurements on a plane‐polar scanning geometry is presented. A significant reduction in the acquisition time as well as in the size of the measurement facility is obtained. A uniformly spaced array of dipoles is chosen as t