✦ LIBER ✦
Novel full range vacuum pressure sensing technique using free decay of trapezoid micro-cantilever beam deflected by electrostatic force
✍ Scribed by Yu-Ting Wang, Tien-Chen Hu, Chi-Jia Tong, Ming-Tzer Lin
- Book ID
- 118787728
- Publisher
- Springer-Verlag
- Year
- 2012
- Tongue
- English
- Weight
- 530 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0946-7076
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