✦ LIBER ✦
Novel fast atom beam (FAB) processes for fabricating functional nanostructures on three-dimensional microstructures
✍ Scribed by M. Hatakeyama; S. Tanaka; K. Ichiki; Y. Toma; M. Nakao; Y. Hatamura
- Book ID
- 106186274
- Publisher
- Springer-Verlag
- Year
- 1997
- Tongue
- English
- Weight
- 762 KB
- Volume
- 3
- Category
- Article
- ISSN
- 0946-7076
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