𝔖 Bobbio Scriptorium
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Novel cantilever design with high control of the mechanical performance

✍ Scribed by J.A. Plaza; K. Zinoviev; G. Villanueva; C. Domínguez

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
303 KB
Volume
84
Category
Article
ISSN
0167-9317

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✦ Synopsis

A novel mechanical structure design with reduced deflection offset is reported. This design offers a batch processing solution to a wellknown problem in the fabrication of very thin crystalline silicon structures, that is initial bending due to anchoring deformation. Mechanical characteristics have been studied and shown comparable to those of a standard cantilever. Finite Element Modeling (FEM) and experimental results show a decrease in initial bending, in dispersion of such bending, and in the dispersion of mechanical properties of the cantilevers, what improve features of arrays.

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