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Note on silicide formation in thin cermet films

✍ Scribed by J. Beynon


Publisher
Elsevier Science
Year
1976
Tongue
English
Weight
72 KB
Volume
37
Category
Article
ISSN
0040-6090

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Ytterbium silicide (YbSi 1.7 ) thin films were prepared on single-crystal Si (111) wafers and fused silica plates by solid-phase crystallization. The structure and phase transformations of the films were analysed by X-ray diffraction and Rutherford backscattering spectroscopy (RBS). The electrical p