Nonstoichiometric germanium nitride. A new insulating material for MIS microelectronics. I. The choice of the insulator and deposition

✍ Scribed by Bagratishvili, G. D. ;Dzhanelidze, R. B. ;Jishiashvili, D. A.

• Book ID: 105377017
• Publisher: John Wiley and Sons
• Year: 1983
• Tongue: English
• Weight: 622 KB
• Volume: 78
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.2210780113