Nonlinear Sequential Bayesian Analysis-Based Decision Making for End-Point Detection of Chemical Mechanical Planarization (CMP) Processes

✍ Scribed by Zhenyu Kong; Beyca, O.; Bukkapatnam, S.T.; Komanduri, R.

• Book ID: 114669523
• Publisher: IEEE
• Year: 2011
• Tongue: English
• Weight: 679 KB
• Volume: 24
• Category: Article
• ISSN: 0894-6507
• DOI: 10.1109/tsm.2011.2164100