✦ LIBER ✦
Nonlinear model-based control of the Czochralski process II: Reconstruction of crystal radius and growth rate from the weighing signal
✍ Scribed by J. Winkler; M. Neubert; J. Rudolph
- Book ID
- 108166032
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 601 KB
- Volume
- 312
- Category
- Article
- ISSN
- 0022-0248
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