Adaptive sliding mode control of a high-
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Her-Terng Yau; Jun-Juh Yan
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Article
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2009
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Elsevier Science
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English
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High-precision position control has been widely used in scientific instruments and semiconductor fabrication equipment. Traditionally, controllable displacements with sub-micron and nano-level resolution are usually achieved by piezoelectric actuators because of their high bandwidth and ease of cont