๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Nonlinear micro-dynamic behavior of a ball-screw driven precision slide system

โœ Scribed by Paul I. Ro; Peter I. Hubbel


Book ID
107889083
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
674 KB
Volume
14
Category
Article
ISSN
0141-6359

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Adaptive sliding mode control of a high-
โœ Her-Terng Yau; Jun-Juh Yan ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 734 KB

High-precision position control has been widely used in scientific instruments and semiconductor fabrication equipment. Traditionally, controllable displacements with sub-micron and nano-level resolution are usually achieved by piezoelectric actuators because of their high bandwidth and ease of cont