Nonlinear image self-filtering with liquid crystal spatial light modulator

✍ Scribed by K Harada; M Itoh; S Kotova; A Naumov; A Parfenov; T Yatagai

• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 538 KB
• Volume: 30
• Category: Article
• ISSN: 0030-3992
• DOI: 10.1016/s0030-3992(98)00040-1

✦ Synopsis

Nonlinear spatial ®ltering is realized due to the electro-optical eect in spatial light modulators (SLMs). Optical methods with nonlinear ®ltering are suggested for various optical applications such as optical inspection of photolithography masks, wavefront sensor, etc. A fast optical response of the SLM allows optical inspection with a video (or faster) rate. The optical system proposed is tolerant to the vibrations and temperature variations because of the dynamic properties of the SLM.